diff --git a/drivers/iio/adc/at91-sama5d2_adc.c b/drivers/iio/adc/at91-sama5d2_adc.c
index b76328da0cb2..1ceab097335c 100644
--- a/drivers/iio/adc/at91-sama5d2_adc.c
+++ b/drivers/iio/adc/at91-sama5d2_adc.c
@@ -138,8 +138,7 @@ struct at91_adc_reg_layout {
 /* Extended Mode Register */
 	u16				EMR;
 /* Extended Mode Register - Oversampling rate */
-#define AT91_SAMA5D2_EMR_OSR(V)			((V) << 16)
-#define AT91_SAMA5D2_EMR_OSR_MASK		GENMASK(17, 16)
+#define AT91_SAMA5D2_EMR_OSR(V, M)		(((V) << 16) & (M))
 #define AT91_SAMA5D2_EMR_OSR_1SAMPLES		0
 #define AT91_SAMA5D2_EMR_OSR_4SAMPLES		1
 #define AT91_SAMA5D2_EMR_OSR_16SAMPLES		2
@@ -403,6 +402,8 @@ static const struct at91_adc_reg_layout sama7g5_layout = {
  * @max_index:		highest channel index (highest index may be higher
  *			than the total channel number)
  * @hw_trig_cnt:	number of possible hardware triggers
+ * @osr_mask:		oversampling ratio bitmask on EMR register
+ * @osr_vals:		available oversampling rates
  */
 struct at91_adc_platform {
 	const struct at91_adc_reg_layout	*layout;
@@ -414,6 +415,8 @@ struct at91_adc_platform {
 	unsigned int				max_channels;
 	unsigned int				max_index;
 	unsigned int				hw_trig_cnt;
+	unsigned int				osr_mask;
+	unsigned int				osr_vals;
 };
 
 /**
@@ -612,6 +615,10 @@ static const struct at91_adc_platform sama5d2_platform = {
 	.max_index = AT91_SAMA5D2_MAX_CHAN_IDX,
 #define AT91_SAMA5D2_HW_TRIG_CNT	3
 	.hw_trig_cnt = AT91_SAMA5D2_HW_TRIG_CNT,
+	.osr_mask = GENMASK(17, 16),
+	.osr_vals = BIT(AT91_SAMA5D2_EMR_OSR_1SAMPLES) |
+		    BIT(AT91_SAMA5D2_EMR_OSR_4SAMPLES) |
+		    BIT(AT91_SAMA5D2_EMR_OSR_16SAMPLES),
 };
 
 static const struct at91_adc_platform sama7g5_platform = {
@@ -627,6 +634,10 @@ static const struct at91_adc_platform sama7g5_platform = {
 	.max_index = AT91_SAMA7G5_MAX_CHAN_IDX,
 #define AT91_SAMA7G5_HW_TRIG_CNT	3
 	.hw_trig_cnt = AT91_SAMA7G5_HW_TRIG_CNT,
+	.osr_mask = GENMASK(18, 16),
+	.osr_vals = BIT(AT91_SAMA5D2_EMR_OSR_1SAMPLES) |
+		    BIT(AT91_SAMA5D2_EMR_OSR_4SAMPLES) |
+		    BIT(AT91_SAMA5D2_EMR_OSR_16SAMPLES),
 };
 
 static int at91_adc_chan_xlate(struct iio_dev *indio_dev, int chan)
@@ -725,34 +736,45 @@ static void at91_adc_eoc_ena(struct at91_adc_state *st, unsigned int channel)
 		at91_adc_writel(st, EOC_IER, BIT(channel));
 }
 
-static void at91_adc_config_emr(struct at91_adc_state *st)
+static int at91_adc_config_emr(struct at91_adc_state *st,
+			       u32 oversampling_ratio)
 {
 	/* configure the extended mode register */
 	unsigned int emr = at91_adc_readl(st, EMR);
+	unsigned int osr_mask = st->soc_info.platform->osr_mask;
+	unsigned int osr_vals = st->soc_info.platform->osr_vals;
 
 	/* select oversampling per single trigger event */
 	emr |= AT91_SAMA5D2_EMR_ASTE(1);
 
 	/* delete leftover content if it's the case */
-	emr &= ~AT91_SAMA5D2_EMR_OSR_MASK;
+	emr &= ~osr_mask;
 
 	/* select oversampling ratio from configuration */
-	switch (st->oversampling_ratio) {
+	switch (oversampling_ratio) {
 	case AT91_OSR_1SAMPLES:
-		emr |= AT91_SAMA5D2_EMR_OSR(AT91_SAMA5D2_EMR_OSR_1SAMPLES) &
-		       AT91_SAMA5D2_EMR_OSR_MASK;
+		if (!(osr_vals & BIT(AT91_SAMA5D2_EMR_OSR_1SAMPLES)))
+			return -EINVAL;
+		emr |= AT91_SAMA5D2_EMR_OSR(AT91_SAMA5D2_EMR_OSR_1SAMPLES,
+					    osr_mask);
 		break;
 	case AT91_OSR_4SAMPLES:
-		emr |= AT91_SAMA5D2_EMR_OSR(AT91_SAMA5D2_EMR_OSR_4SAMPLES) &
-		       AT91_SAMA5D2_EMR_OSR_MASK;
+		if (!(osr_vals & BIT(AT91_SAMA5D2_EMR_OSR_4SAMPLES)))
+			return -EINVAL;
+		emr |= AT91_SAMA5D2_EMR_OSR(AT91_SAMA5D2_EMR_OSR_4SAMPLES,
+					    osr_mask);
 		break;
 	case AT91_OSR_16SAMPLES:
-		emr |= AT91_SAMA5D2_EMR_OSR(AT91_SAMA5D2_EMR_OSR_16SAMPLES) &
-		       AT91_SAMA5D2_EMR_OSR_MASK;
+		if (!(osr_vals & BIT(AT91_SAMA5D2_EMR_OSR_16SAMPLES)))
+			return -EINVAL;
+		emr |= AT91_SAMA5D2_EMR_OSR(AT91_SAMA5D2_EMR_OSR_16SAMPLES,
+					    osr_mask);
 		break;
 	}
 
 	at91_adc_writel(st, EMR, emr);
+
+	return 0;
 }
 
 static int at91_adc_adjust_val_osr(struct at91_adc_state *st, int *val)
@@ -1643,6 +1665,7 @@ static int at91_adc_write_raw(struct iio_dev *indio_dev,
 			      int val, int val2, long mask)
 {
 	struct at91_adc_state *st = iio_priv(indio_dev);
+	int ret = 0;
 
 	if (iio_buffer_enabled(indio_dev))
 		return -EBUSY;
@@ -1656,12 +1679,14 @@ static int at91_adc_write_raw(struct iio_dev *indio_dev,
 		mutex_lock(&st->lock);
 		if (val == st->oversampling_ratio)
 			goto unlock;
-		st->oversampling_ratio = val;
 		/* update ratio */
-		at91_adc_config_emr(st);
+		ret = at91_adc_config_emr(st, val);
+		if (ret)
+			goto unlock;
+		st->oversampling_ratio = val;
 unlock:
 		mutex_unlock(&st->lock);
-		return 0;
+		return ret;
 	case IIO_CHAN_INFO_SAMP_FREQ:
 		if (val < st->soc_info.min_sample_rate ||
 		    val > st->soc_info.max_sample_rate)
@@ -1834,7 +1859,7 @@ static void at91_adc_hw_init(struct iio_dev *indio_dev)
 	at91_adc_setup_samp_freq(indio_dev, st->soc_info.min_sample_rate);
 
 	/* configure extended mode register */
-	at91_adc_config_emr(st);
+	at91_adc_config_emr(st, st->oversampling_ratio);
 }
 
 static ssize_t at91_adc_get_fifo_state(struct device *dev,
